Quartz-enhanced photoacoustic spectroscopy employing pilot line manufactured custom tuning forks

Pilot line manufactured custom quartz tuning forks (QTFs) with a resonance frequency of 28 kHz and a Q value of >30, 000 in a vacuum and ∼ 7500 in the air, were designed and produced for trace gas sensing based on quartz enhanced photoacoustic spectroscopy (QEPAS). The pilot line was able to produce hundreds of low-frequency custom QTFs with small frequency shift < 10 ppm, benefiting the detecting of molecules with slow vibrational-translational (V-T) relaxation rates. An Au film with a thickness of 600 nm were deposited on both sides of QTF to enhance the piezoelectric charge collection efficiency and reduce the environmental electromagnetic noise. The laser focus position and modulation depth were optimized. With an integration time of 84 s, a normalized noise equivalent absorption (NNEA) coefficient of 1.7 × 10^-8 cm^-1∙W∙Hz^-1/2 was achieved which is ∼10 times higher than a commercially available QTF with a resonance frequency of 32 kHz.