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3D dark-field confocal microscopy for subsurface defects detection.

Jian Liu, Jing Liu, Chenguang Liu

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    |February 1, 2020
    PubMed
    Summary
    This summary is machine-generated.

    This study introduces a 3D dark-field confocal microscopy method for detecting subsurface defects (SSDs) in optical components. The technique effectively measures SSDs deep within materials, crucial for advanced manufacturing.

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    Area of Science:

    • Optical Engineering
    • Materials Science
    • Metrology

    Background:

    • Subsurface defect detection is critical for advanced manufacturing.
    • Existing methods struggle with 3D precision measurement of these defects.

    Purpose of the Study:

    • To develop and demonstrate a 3D dark-field confocal microscopy technique for subsurface defect detection.
    • To enable simultaneous measurement of surface topography and subsurface defects.

    Main Methods:

    • Utilized a 3D dark-field confocal microscopy setup.
    • Employed complementary illumination and detection apertures with annular illumination via axicons.
    • Blocked specular reflection while collecting scattered light from defects.

    Main Results:

    • Successfully detected subsurface defects 60 µm deep in neodymium glass.
    • Enabled simultaneous measurement of surface topography and subsurface defect distribution.
    • Reconstructed the 3D volume distributions of subsurface defects.

    Conclusions:

    • The developed 3D dark-field confocal microscopy is effective for detecting subsurface defects in ultraprecise optical components.
    • This technique advances metrology for laser fusion facilities and other high-precision applications.