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Expanding Bias-instability of MEMS Silicon Oscillating Accelerometer Utilizing AC Polarization and Self-Compensation

Yang Zhao1, Guoming Xia1, Qin Shi1

  • 1School of Mechanical Engineering, Department of Instrument Science and Technology, Nanjing University of Science and Technology, Nanjing 210094, Jiangsu, China.

Sensors (Basel, Switzerland)
|March 12, 2020
PubMed

Keywords:
AC polarizationMEMS oscillating accelerometerbias-instabilityflicker noisefront-end TIAself-compensation

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