Graphene bandgap induced by ferroelectric HfO2 doped with Zr (HfZrO)
Mircea Dragoman1, Adrian Dinescu1, Florin Nastase1
1National Institute for Research and Development in Microtechnology (IMT), Str. Erou Iancu Nicolae 126A, Voluntari 077190, Romania.
Abstract:
Motivated by the need to open a bandgap in graphene, we show experimentally that the CMOS-compatible ferroelectric HfZrO substrate induces a bandgap of 0.18 eV in graphene monolayer, which allows top-gate graphene/HfZrO/SiO2/Si field-effect transistors to have high on/off current ratio, of about 103, at small drain voltages, of 0.5 V, and for gate voltage spans of only 3.5 V. In addition, these transistors have a very high transconductance, of about 1 mS, and carrier mobilities of 7900 cm2 Vs-1. The results show that this relatively simple and wafer-scale compatible bandgap opening method in graphene renders this material useful for digital low-power electronics.
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