Molecule Sensitive Optical Imaging and Monitoring Techniques-A Review of Applications in Micro-Process Engineering

Marcel Nachtmann1, Julian Deuerling1, Matthias Rädle1

  • 1Reseach Center CeMOS, Mannheim University of Applied Sciences, Paul-Wittsack-Str. 10, 68163 Mannheim, Germany.

Micromachines
|April 2, 2020
PubMed