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Flexible touch sensor fabricated by double-sided nanoimprint lithography metal transfer
Muyi Yang1, Kai Xu1, Liang Wang1
1Department of Optics and Optical Engineering, Anhui Key Laboratory of Optoelectronic Science and Technology, University of Science and Technology of China, No.96, JinZhai Road, Hefei 230026, Anhui, People's Republic of China.
None:
A double-sided nanoimprint lithography metal transfer method has been developed to fabricate a flexible capacitive touch sensor. The electrodes of this sensor are aligned and overlapped to each other and consist of a diamond aluminum mesh, which achieved a transmittance of 94% and anisotropic surface resistivity. The maximum capacitance change of the touch sensor unit is up to 41.8% when fullly touched. A 3 × 3 sensor array was tested to prove good touch detection function and the potential for large-scale applications.

