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Fabrication and Characterization of Superconducting Resonators
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Multi-Frequency Resonance Behaviour of a Si FractalNEMS Resonator
Vassil Tzanov1, Jordi Llobet2,3, Francesc Torres1
1Department of Electronics Engineering, Engineering School, Universitat Autonoma de Barcelona (UAB),08193 Bellaterra, Spain.
Nanomaterials (Basel, Switzerland)
|April 29, 2020
Summary
A novel silicon fractal resonator was fabricated, exhibiting broadband frequency response and multiple operational bands. This design offers a larger functionalization area compared to traditional resonators.
Area of Science:
- Nanotechnology
- Mechanical Engineering
- Materials Science
Background:
- Mechanical resonators are crucial for various sensing and signal processing applications.
- Existing designs often have limitations in terms of size, functionalization area, and frequency response.
- Fractal geometries offer unique properties for micro- and nanoscale devices.
Purpose of the Study:
- To design and fabricate a novel silicon-based nanosize mechanical resonator with a fractal structure.
- To characterize its frequency response and performance.
- To explore its potential for multiple operational bands and enhanced functionalization.
Main Methods:
- Top-down fabrication using focused ion-beam on a Silicon-On-Insulator (SOI) wafer.
- Numerical derivation of a seven star-polygon fractal geometry for the resonating body.
- Interferometric characterization for frequency response and quality factor measurement.
- Finite Element Method (FEM) simulations using COMSOL for model fitting and analysis.
Main Results:
- Successful fabrication of a fractal silicon resonator with dimensions of 10 µm trench and 12 µm width.
- Experimental confirmation of broadband frequency response with quality factors exceeding 800 between 2 MHz and 16 MHz.
- FEM simulations accurately matched experimental eigenfrequencies by adjusting material properties and residual stress.
- Demonstrated potential for multiple operational bands and electrical readout capability.
Conclusions:
- The fabricated fractal silicon resonator exhibits promising broadband frequency response and multiple operational bands.
- The fractal design allows for a significantly larger surface area for functionalization compared to single-beam resonators.
- The device shows potential for miniaturized, multi-functional applications in sensing and signal processing.
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