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Updated: Dec 21, 2025

Comprehensive Characterization of Extended Defects in Semiconductor Materials by a Scanning Electron Microscope
Published on: May 28, 2016
Kevin Kaufmann1, Chaoyi Zhu2, Alexander S Rosengarten1
1Department of NanoEngineering, UC San Diego, La Jolla, CA92093, USA.
Machine learning now enables accurate phase identification using electron backscatter diffraction (EBSD) patterns. This advances materials analysis, making EBSD a faster, high-throughput technique for unknown phase identification.
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