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Highly Stretchable and Sensitive Pressure Sensor Array Based on Icicle-Shaped Liquid Metal Film Electrodes
Yiqiu Zhang1, Sidi Liu1, Yihui Miao2
1Institute of Functional Nano and Soft Materials (FUNSOM), Jiangsu Key Laboratory for Carbon-Based Functional Materials and Devices, Soochow University, Suzhou, Jiangsu 215123, China.
ACS Applied Materials & Interfaces
|June 6, 2020
Summary
Researchers developed a highly stretchable and sensitive capacitive pressure sensor using liquid metal electrodes. This innovative sensor achieves excellent performance for wearable electronics and various pressure monitoring applications.
Area of Science:
- Materials Science
- Electrical Engineering
- Wearable Technology
Background:
- Flexible pressure sensors are crucial for wearable electronics, demanding high sensitivity and stretchability.
- Simultaneously optimizing electrical performance and mechanical stretchability remains a significant challenge in sensor design.
Purpose of the Study:
- To develop a straightforward, cost-effective method for fabricating highly stretchable and sensitive capacitive pressure sensor arrays.
- To address the challenge of maximizing both electrical performance and mechanical stretchability in flexible pressure sensors.
Main Methods:
- Fabrication of capacitive pressure sensors using an icicle-shaped liquid metal film electrode integrated with an elastomer.
- Utilizing a unique elastic bump structure that increases electrode overlap and decreases separation distance under pressure.
- Designing and processing liquid metal and elastomer for reliable sensor performance.
Main Results:
- Achieved high sensitivity of 39% kPa⁻¹ within the 0-1 kPa range.
- Demonstrated a low limit of detection as low as 12 Pa.
- Exhibited excellent stretchability up to 94% strain without failure and a hysteresis error of 8.46% at 25 kPa.
Conclusions:
- The developed sensor offers a novel capacitive sensing scheme with enhanced sensitivity and superior mechanical properties.
- Successfully demonstrated applications in force measurements on curved surfaces, contour mapping, and monitoring cervical postures.
- This cost-effective fabrication method provides a promising solution for advanced wearable electronic applications.

