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Related Experiment Video

Updated: Dec 18, 2025

Origami Inspired Self-assembly of Patterned and Reconfigurable Particles
12:33

Origami Inspired Self-assembly of Patterned and Reconfigurable Particles

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Bidirectional Self-Folding with Atomic Layer Deposition Nanofilms for Microscale Origami.

Baris Bircan1, Marc Z Miskin2,3, Robert J Lang4

  • 1School of Applied and Engineering Physics, Cornell University, 271 Clark Hall, Ithaca, New York 14853, United States.

Nano Letters
|June 12, 2020
PubMed
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Researchers developed new micro-origami devices using nanoscale films for self-folding. This fabrication method enables mass production of complex micromechanical systems for micro- and nanoscale manipulation.

Area of Science:

  • Materials Science
  • Mechanical Engineering
  • Nanotechnology

Background:

  • Origami principles enable scale-invariant design and miniaturization.
  • Previous microscale origami fabrication used unidirectionally actuated nanoscale sheets.
  • Nanoscale fabrication requires advanced techniques for complex structures.

Purpose of the Study:

  • To engineer bidirectional folding in nanoscale sheets for micro-origami.
  • To develop a method for fabricating complex micro-origami devices using atomic layer deposition (ALD) bilayers.
  • To enable mass fabrication and deployment of micromechanical systems.

Main Methods:

  • Utilized 4 nm thick SiN-SiO2 bilayer films fabricated via ALD.
  • Engineered strain differentials within bilayers to induce bending and controlled curvature.
Keywords:
Atomic layer depositionmicrostructuresnanofabricationorigamiself-assembly

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  • Employed lithographic patterning and rigid panels to localize bending.
  • Demonstrated self-folding of patterned microstructures upon release.

    • Main Results:

    • Successfully fabricated complex micro-origami devices from nanoscale sheets.
    • Achieved controlled bidirectional folding through engineered strain differentials.
    • Demonstrated self-assembly of microstructures into prescribed patterns.
    • Combined semiconductor microfabrication with origami design principles.

    Conclusions:

    • This approach facilitates the mass fabrication and deployment of micro-origami devices.
    • The developed method is a significant advancement in creating deployable micromechanical systems.
    • These micro-origami devices can interact with and manipulate micro- and nanoscale environments effectively.