A new micro/nano-touch-trigger probe using an optoelectronic sensor with a wedge prism

Area of Science:

• Metrology
• Optical Sensing
• Precision Engineering

Background:

• Traditional touch-trigger probes often have limitations in measurement range and complexity.
• Achieving precise 3D detection typically requires multiple sensors or complex optical systems.

Purpose of the Study:

• To introduce a novel touch-trigger probe with enhanced precision and an expanded measurement range.
• To demonstrate a simplified 3D detection method using a single optoelectronic sensor and a wedge prism.

Main Methods:

• Design and implementation of a new optical structure incorporating a wedge prism for sensing.
• Integration of a single optoelectronic sensor for comprehensive 3D measurement.
• Characterization of probe performance including stiffness, sensitivity, resolution, and repeatability.

Main Results:

• The new optical structure expanded the measurement range from ±8 µm to ±14 µm.
• The probe exhibits uniform stiffness and sensitivity across its measurement range.
• Experimental validation confirmed a high resolution of 10 nm and repeatability under 9.1 nm.

Conclusions:

• The proposed touch-trigger probe offers a significant advancement in precision measurement.
• The use of a wedge prism enables efficient 3D detection with a simplified optical setup.
• The probe's performance characteristics make it suitable for various demanding metrology applications.