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WRe26-In2O3 probe-type thin film thermocouples applied to high temperature measurement
Bian Tian1, Yan Liu1, Zhongkai Zhang1
1State Key Laboratory for Mechanical Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, Shaanxi 710048, China.
Abstract:
A novel probe-type thin film thermocouple has been fabricated successfully for high temperature measurement applications. WRe26 (tungsten-26% rhenium)-In2O3 thermoelectric materials were used in the thermocouples to achieve high thermoelectric output and high temperature resistance. The films were deposited on a cylindrical substrate by magnetron sputtering technology. The annealing process of the thermocouples was studied to achieve optimal performance. The calibration results showed the thermoelectric output of WRe26-In2O3 thin film thermocouples reached 93.7 mv at 700 °C, and its sensitivity was 165.5 µV/°C under the temperature of the cold junction, which was 133.8 °C. The thermocouples developed in this work have great potential for practical applications.
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