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A Novel Stick-Slip Nanopositioning Stage Integrated with a Flexure Hinge-Based Friction Force Adjusting Structure
Junhui Zhu1, Peng Pan2,3, Yong Wang1
1School of Mechatronic Engineering and Automation, Shanghai University, Shanghai 200444, China.
Micromachines
|August 16, 2020
Summary
This study introduces a novel piezoelectrically-actuated stick-slip nanopositioning stage (PASSNS) with a flexure hinge-based friction adjustment unit. The new design achieves high accuracy, speed, and load capacity, demonstrating its potential for advanced nanopositioning applications.
Area of Science:
- Mechanical Engineering
- Nanotechnology
- Precision Engineering
Background:
- Piezoelectrically-actuated stick-slip nanopositioning stages (PASSNS) are widely used but sensitive to friction forces.
- Friction significantly impacts load capacity, dynamic performance, and positioning accuracy in PASSNS.
Purpose of the Study:
- To develop a novel PASSNS that mitigates the negative effects of friction.
- To introduce a flexure hinge-based friction force adjusting unit for enhanced control.
Main Methods:
- Numerical analysis for static performance estimation.
- Dynamic modeling and simulation for dynamic performance evaluation.
- Prototype manufacturing and experimental validation.
Main Results:
- Achieved maximum speeds of 1 mm/s (forward) and 0.7 mm/s (backward).
- Demonstrated minimum step displacements of approximately 11 nm (forward) and 12 nm (backward).
- Exhibited robust performance with minimal step displacement increase (6-8%) under a 20 g load and a vertical load capacity of 72 g.
Conclusions:
- The developed PASSNS with a friction adjusting unit is feasible and effective.
- The stage offers high accuracy, high speed, and excellent load robustness.
- The design shows significant potential for diverse nanopositioning applications.
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