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Monolithically Integrated Diffused Silicon Two-Zone Heaters for Silicon-Pyrex Glass Microreactors for Production of
Milena Rašljić Rafajilović1, Katarina Radulović1, Milče M Smiljanić1
1Center of Microelectronic Technologies, Institute of Chemistry, Technology and Metallurgy- National Institute of the Republic of Serbia, University of Belgrade, Njegoševa 12, 11000 Belgrade, Serbia.
Micromachines
|September 3, 2020
Summary
Researchers developed novel silicon heaters for high-temperature microreactors, enabling precise nanoparticle fabrication. This robust, controllable method offers improved performance over traditional heaters for various materials.
Area of Science:
- Materials Science
- Microfluidics
- Nanotechnology
Background:
- High-temperature microreactors are crucial for nanoparticle synthesis.
- Existing microreactor heaters often lack precise temperature control and stability.
- Silicon-based heaters offer potential for improved performance and integration.
Purpose of the Study:
- To design, simulate, fabricate, and characterize novel silicon two-zone heaters for a high-temperature microreactor.
- To enable precise temperature control for nanoparticle fabrication.
- To demonstrate a robust and controllable fabrication method.
Main Methods:
- Finite element method (FEM) simulations for heater performance analysis.
- Fabrication of p-type boron-diffused silicon spiral heaters monolithically integrated into a microreactor.
- Anodic bonding of silicon and Pyrex glass wafers with etched microchannels.
- Electrical measurements and infrared thermal imaging for characterization.
Main Results:
- Successfully fabricated and characterized two thermally isolated silicon heaters with different temperature zones.
- Demonstrated robust, stable, and controllable heater performance with reduced sensitivity to fabrication variations.
- Achieved improved control over heater characteristics via Boron doping adjustments, outperforming metallic/polysilicon heaters.
Conclusions:
- The proposed silicon heater fabrication method is reliable and adaptable for high-temperature microsystems.
- The developed microreactor is suitable for titanium dioxide nanoparticle production and adaptable for other materials.
- This approach provides a versatile platform for advanced nanoparticle synthesis and high-temperature microfabrication.
