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Numerical Simulation of Optical Sensing by the Far Field Pattern Radiated by Periodic Grating Strips Over Silica
Andrei Tsarev1,2, Vittorio M N Passaro3
1Laboratory of Optical Materials and Structures, Rzhanov Institute of Semiconductor Physics, SB RAS, 630090 Novosibirsk, Russia.
Sensors (Basel, Switzerland)
|September 19, 2020
Summary
This study introduces a novel optical sensor using a silicon oxynitride (SiON) grating. The sensor achieves high sensitivity for refractive index changes, with potential for precise environmental monitoring.
Area of Science:
- Photonics and Sensor Technology
- Materials Science (Silicon Oxynitride)
Background:
- Optical sensors are crucial for detecting environmental changes.
- Existing sensors may lack sensitivity or require complex interrogation.
- Silicon oxynitride (SiON) offers tunable optical properties.
