Metastable Atomic Layer Deposition: 3D Self-Assembly toward Ultradark Materials

Mario Ziegler1,2, André Dathe3, Kilian Pollok4

  • 1Competence Center for Micro- and Nanotechnologies, Leibniz Institute of Photonic Technology Jena (IPHT), Albert-Einstein-Straße 9, 07745 Jena, Germany.

ACS Nano
|October 6, 2020
PubMed

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