The milliDelta: A high-bandwidth, high-precision, millimeter-scale Delta robot

Area of Science:

• Microelectromechanical Systems (MEMS)
• Robotics
• Mechatronics

Background:

• Industrial Delta robots offer high precision and speed for pick-and-place tasks.
• These characteristics are valuable for millimeter-scale applications like microsurgery and microassembly.
• Manufacturing and actuation present challenges for miniaturized Delta robots.

Purpose of the Study:

• To design, fabricate, and characterize a millimeter-scale Delta robot (milliDelta).
• To overcome manufacturing and actuation challenges for high-speed, high-precision micro-robotics.
• To adapt Delta robot principles for micro-scale applications.

Main Methods:

• Leveraged printed circuit microelectromechanical system (MEMS) manufacturing techniques.
• Utilized three independently controlled piezoelectric bending actuators for motion.
• Incorporated a transmission linkage system within the laminate structure and adapted joints.

Main Results:

• The milliDelta robot measures 15x15x20 mm with a mass of 430 mg and 1.31 g payload capacity.
• Achieved precision down to ~5 micrometers within a 7.01 mm³ workspace.
• Demonstrated high-speed performance with trajectory following up to 75 Hz, velocities of ~0.45 m/s, and accelerations of ~215 m/s².

Conclusions:

• The milliDelta successfully integrates Delta robot functionality at the millimeter scale.
• The design overcomes miniaturization challenges using MEMS and piezoelectric actuation.
• The robot is suitable for high-bandwidth, high-precision micro-scale applications requiring compact designs.