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Inelastic Scattering in Electron Backscatter Diffraction and Electron Channeling Contrast Imaging.

Budhika G Mendis1, Juri Barthel2, Scott D Findlay3

  • 1Department of Physics, Durham University, South Road, DurhamDH1 3LE, UK.

Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada
|November 16, 2020
PubMed
Summary
This summary is machine-generated.

Electron backscatter diffraction (EBSD) and electron channeling contrast imaging (ECCI) are affected by plasmon excitations. Simulations show plasmon scattering impacts EBSD patterns more than ECCI dislocation images.

Keywords:
EBSDECCIbackscattered electronsmultisliceplasmons

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Area of Science:

  • Materials Science
  • Solid State Physics
  • Electron Microscopy

Background:

  • Electron backscatter diffraction (EBSD) and electron channeling contrast imaging (ECCI) are crucial for analyzing material crystallographic properties.
  • These techniques utilize backscattered electrons, which exhibit a broad energy distribution.
  • Understanding factors influencing signal quality is essential for accurate material characterization.

Purpose of the Study:

  • To investigate the impact of plasmon excitations on EBSD patterns and ECCI dislocation images.
  • To elucidate the role of inelastic scattering in these electron microscopy techniques.
  • To provide insights into optimizing EBSD and ECCI for defect analysis.

Main Methods:

  • Multislice simulations incorporating inelastic scattering were performed.
  • The study focused on silicon as a model material.
  • Simulations analyzed the influence of plasmon scattering on EBSD band contrast and ECCI dislocation imaging.

Main Results:

  • Plasmon excitations were found to significantly influence EBSD patterns, with maximum Kikuchi band contrast observed at minimal energy loss.
  • The effect of plasmon excitation on ECCI images of dislocations was minimal.
  • Simulation results align with previous energy-filtered EBSD measurements.

Conclusions:

  • Plasmon scattering plays a differential role in EBSD and ECCI contrast mechanisms.
  • The characteristic plasmon scattering angle is key to understanding these observed effects.
  • This research clarifies the influence of inelastic scattering on crystallographic analysis using EBSD and ECCI.