Quantitative X-ray Channel-Cut Crystal Diffraction Wavefront Metrology Using the Speckle Scanning Technique

Lian Xue1, Hongxin Luo1, Qianshun Diao2,3

  • 1Shanghai Synchrotron Radiation Facility, Shanghai Advanced Research Institute, Chinese Academy of Sciences, Shanghai 201800, China.

Summary

A new speckle-based X-ray diffraction method precisely measures channel-cut crystal slope errors. This technique offers high angular sensitivity and aids in improving crystal fabrication for advanced X-ray applications.