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Polymeric Microneedle Array Fabrication by Photolithography
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High-Identical Numerical Aperture, Multifocal Microlens Array through Single-Step Multi-Sized Hole Patterning

Joong Hoon Lee1, Sehui Chang1, Min Seok Kim1

  • 1School of Electrical Engineering and Computer Science, Gwangju Institute of Science and Technology (GIST), 123 Cheomdangwagi-ro, Buk-gu, Gwangju 61005, Korea.

Micromachines
|December 3, 2020
PubMed
Summary

This study introduces a novel, cost-effective method for fabricating multifocal microlens arrays (Mf-MLAs) using single-step photolithography and chemical etching. These Mf-MLAs enable extended depth-of-field imaging with uniform, high numerical aperture for improved depth sensing applications.

Keywords:
microlens arraymultiple focal lengthsoptical MEMSthree-dimensional imaging

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Area of Science:

  • Optics and Photonics
  • Microfabrication Technologies
  • Imaging Systems

Background:

  • Microlens arrays (MLAs) are crucial for depth sensing and wide field-of-view imaging.
  • A key limitation of MLAs is their narrow depth-of-field, hindering accurate depth estimation.
  • Current multifocal microlens array (Mf-MLA) fabrication is costly, slow, and yields non-uniform numerical apertures (NA).

Purpose of the Study:

  • To develop an efficient and cost-effective fabrication method for high numerical aperture (NA) multifocal microlens arrays (Mf-MLAs).
  • To achieve an extended depth-of-field for improved imaging applications.
  • To demonstrate the utility of Mf-MLAs in multi-focal plane image acquisition.

Main Methods:

  • Utilized single-step photolithography assisted by chemical wet etching for Mf-MLA fabrication.
  • Employed a multi-sized hole photomask and controlled wet etch time to manipulate lens parameters.
  • Integrated fabricated Mf-MLAs into a microscope for imaging experiments.

Main Results:

  • Successfully fabricated Mf-MLAs with uniform and high NA across different lens types.
  • Demonstrated three distinct focal lengths within the Mf-MLAs.
  • Achieved multi-focal plane image acquisition using the Mf-MLAs in a microscope setup.

Conclusions:

  • The developed single-step fabrication method offers a high-throughput, low-cost alternative for Mf-MLA production.
  • The Mf-MLAs provide an extended depth-of-field with consistent optical performance.
  • This technology holds significant potential for advancing depth sensing and microscopy imaging.