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Updated: Nov 24, 2025

Microwave Photonics Systems Based on Whispering-gallery-mode Resonators
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Optimization and Fabrication of an MOEMS Gyroscope Based on a WGM Resonator

Dunzhu Xia1, Bing Zhang1, Hao Wu2

  • 1School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China.

Sensors (Basel, Switzerland)
|December 23, 2020
PubMed

Keywords:
MEMS fabrication processMOEMS gyroscopeWGM resonatorquality factor improvement

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