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Research on High-Resolution Miniaturized MEMS Accelerometer Interface ASIC.

Xiangyu Li1, Yangong Zheng1, Xiangyan Kong1

  • 1Faculty of Electrical Engineering and Computer Science, Ningbo University, Ningbo 315211, China.

Sensors (Basel, Switzerland)
|December 23, 2020
PubMed
Summary
This summary is machine-generated.

This study presents a high-precision microelectromechanical system (MEMS) accelerometer interface circuit for geophones. The designed application-specific integrated circuit (ASIC) chip achieves low noise density and excellent linearity for enhanced seismic measurements.

Keywords:
MEMS accelerometersPID feedbackclosed-loopinterface circuit

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Area of Science:

  • Electrical Engineering
  • Materials Science
  • Geophysics

Background:

  • Microelectromechanical system (MEMS) accelerometers are crucial for military and civil applications.
  • Closed-loop microaccelerometer interface circuits offer high signal-to-noise ratio, wide bandwidth, and linearity.
  • There is a demand for high-precision MEMS accelerometers in geophone technology.

Purpose of the Study:

  • To research and develop a high-performance closed-loop application-specific integrated circuit (ASIC) chip for MEMS accelerometers used in geophones.
  • To design an interface circuit optimized for the specific performance parameters and output signals of MEMS accelerometers in geophone applications.

Main Methods:

  • Designed and implemented a closed-loop interface ASIC chip utilizing electrostatic time-multiplexing feedback and proportional-integral-derivative (PID) feedback control.
  • Incorporated a low-noise charge-sensitive amplifier (CSA), sampling and holding circuit, and PID feedback circuit.
  • Optimized noise characteristics, employed capacitance compensation for misalignment, and used correlated double sampling (CDS) to reduce noise and offset.

Main Results:

  • Fabricated a 3.2 mm × 3 mm chip using a 0.35 μm CMOS process.
  • Achieved low power dissipation (7.7 mW at 5 V), noise density below 0.5 μg/Hz1/2, and sensitivity of 1.2 V/g.
  • Demonstrated excellent linearity (0.15%) and bias instability (approximately 50 μg) within an input range of ±1.2 g.

Conclusions:

  • The developed high-precision closed-loop interface ASIC chip meets the requirements for MEMS accelerometers in geophone applications.
  • The integration of advanced techniques like PID control and CDS significantly enhances accelerometer performance.
  • The fabricated chip demonstrates a viable solution for high-performance seismic sensing with potential for widespread adoption.