Radical-triggered cross-linking for molecular layer deposition of SiAlCOH hybrid thin films

Kristina Ashurbekova1, Karina Ashurbekova, Iva Saric

  • 1Dagestan State University, Makhachkala 36700, Russian Federation. krashurbekova@inbox.ru.

Chemical Communications (Cambridge, England)
|February 1, 2021
PubMed

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