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Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators
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Switchable damping for a one-particle oscillator

X Fan1, S E Fayer2, T G Myers2

  • 1Department of Physics, Harvard University, Cambridge, Massachusetts 02138, USA.

The Review of Scientific Instruments
|March 2, 2021
PubMed

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