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Lithography Technology for Micro- and Nanofabrication.

Dahee Baek1, Sang Hun Lee2, Bong-Hyun Jun3

  • 1Department of Bionano Engineering, Hanyang University, Ansan, South Korea.

Advances in Experimental Medicine and Biology
|March 30, 2021
PubMed
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This chapter explores micro and nanofabrication, focusing on lithography techniques. It categorizes methods into conventional and unconventional, detailing their applications and limitations for fabricating miniaturized systems.

Area of Science:

  • Materials Science and Engineering
  • Nanotechnology
  • Physics

Background:

  • Micro and nanofabrication are essential for developing advanced miniaturized systems.
  • Lithography is a critical technique within micro and nanofabrication.
  • Miniaturized systems are vital across diverse fields, including semiconductors, chemical/biological analysis, and biomedical research.

Purpose of the Study:

  • To categorize and classify various lithography techniques.
  • To provide an overview of both conventional and unconventional lithography methods.
  • To discuss the advantages and disadvantages of each technique for process design.

Main Methods:

  • Classification of lithography into conventional (photolithography, electron beam lithography, focused-ion beam lithography) and unconventional (nanoimprint lithography, deformation lithography, colloidal lithography) approaches.
Keywords:
Colloidal lithographyDeformation lithographyElectron beam lithographyFocused ion beam lithographyJet and flash imprint lithographyLithographyMaterial-based lithographyNanofabricationNanoimprint lithographyPhotolithography

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  • Detailed introduction of specific techniques within each category.
  • Comparative analysis of the pros and cons of diverse lithography methods.

    • Main Results:

    • Lithography techniques are broadly categorized into conventional and unconventional.
    • Conventional methods include photolithography, electron beam lithography, and focused-ion beam lithography.
    • Unconventional methods encompass nanoimprint lithography, deformation lithography, and colloidal lithography.

    Conclusions:

    • Understanding the classification and characteristics of different lithography techniques is crucial for selecting appropriate fabrication processes.
    • Each lithography method offers unique advantages and disadvantages that must be considered for specific applications.
    • This classification aids in the rational design of micro and nanofabrication processes for miniaturized systems.