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Performance of Quad Mass Gyroscope in the Angular Rate Mode
Sina Askari1, Mohammad H Asadian1, Andrei M Shkel1
1MicroSystems Laboratory, University of California, Irvine, CA 92697, USA.
Micromachines
|April 3, 2021
Summary
This study analyzes silicon micromachined Quad Mass Gyroscopes (QMGs) in rate mode. Higher Q-factors improve noise performance but pose digital control challenges.
Area of Science:
- MEMS Technology
- Inertial Sensors
- Microsystems Engineering
Background:
- Silicon micromachined gyroscopes are crucial for inertial sensing.
- Understanding performance trade-offs in Quad Mass Gyroscopes (QMGs) is essential for advanced applications.
- The Q-factor significantly influences gyroscope noise and stability.
Purpose of the Study:
- To characterize and analyze silicon micromachined Quad Mass Gyroscopes (QMGs) in rate mode.
- To investigate the trade-offs between full-scale, linearity, and noise characteristics based on Q-factors.
- To evaluate the impact of different sense mode configurations (Open-Loop and Force-to-Rebalance) on performance.
Main Methods:
- Utilized Allan Deviation (ADEV) and Power Spectral Density (PSD) analysis for performance evaluation.
- Instrumented QMGs for rate mode operation in both Open-Loop (OL) and Force-to-Rebalance (FRB) configurations.
- Analyzed constraints on control parameters relative to device Q-factor.
Main Results:
- Demonstrated bias instability of 0.095°/hr and Angle Random Walk (ARW) of 0.0107°/hr in OL mode for a high Q-factor device (>2 million).
- Achieved bias instability of 0.065°/hr and ARW of 0.0058°/hr in FRB mode for the same device.
- Identified that higher Q-factors enhance frequency stability and noise performance in realistic MEMS gyroscopes with imperfections.
Conclusions:
- Higher Q-factors in MEMS gyroscopes improve frequency stability and noise performance.
- Imperfections like frequency asymmetry present challenges for digital control loop implementation.
- The study provides critical insights into optimizing QMG performance for rate-mode applications.
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