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Updated: Nov 10, 2025

Picometer-Precision Atomic Position Tracking through Electron Microscopy
Published on: July 3, 2021
Removing background and estimating a unit height of atomic steps from a scanning probe microscopy image using a
1RIKEN Center for Emergent Matter Science, Wako, Saitama 351-0198, Japan.
We developed a statistical method for scanning probe microscopy images to accurately remove background noise and measure atomic step heights. This technique precisely quantifies surface topography, achieving picometer-level precision for atomic step height estimation.
Area of Science:
- Surface science
- Materials science
- Nanotechnology
Background:
- Scanning probe microscopy (SPM) generates complex topographic data.
- Accurate background subtraction is crucial for analyzing surface features.
- Quantifying atomic step heights is essential for understanding surface properties.
Purpose of the Study:
- To present a novel statistical method for background removal and atomic step height estimation in SPM images.
- To provide a unified framework for surface analysis, including terrace height evaluation.
- To enable extraction of quantitative information using prior knowledge.
Main Methods:
- Utilizing a mixture model with multiple statistical distributions to represent image data.
- Implementing a comprehensive statistical approach for background surface subtraction.
- Integrating prior knowledge to estimate atomic step heights and terrace heights.
Main Results:
- Demonstrated method on a scanning tunneling microscope (STM) topographic image of a Cu(111) surface.
- Achieved precise background subtraction, making all terraces parallel to a horizontal plane.
- Estimated atomic step unit height with picometer-level precision.
Conclusions:
- The statistical method offers a robust solution for background removal and height analysis in SPM.
- The approach enables accurate quantification of surface features, including atomic step heights.
- An open-source implementation is available, facilitating broader research applications.
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