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Motionless Polarizing Structured Illumination Microscopy.

Hyo Mi Park1, Ki-Nam Joo1

  • 13D Optical Metrology Laboratory, Department of Photonic Engineering, Chosun University, 309 Pilmun-Daero, Dong-gu, Gwangju 61452, Korea.

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|April 30, 2021
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Summary
This summary is machine-generated.

This study introduces a novel motionless polarizing structured illumination microscopy for 3D surface profiling. The system achieves high-precision measurements of surface topography without mechanical scanning, demonstrating its potential for advanced metrology.

Keywords:
focus tunable lenspolarizing illumination patternspatial phase-shiftingstructured illumination microscopy

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Area of Science:

  • Optical Metrology
  • Microscopy Techniques
  • Surface Profilometry

Background:

  • Accurate 3D surface profiling is crucial for various scientific and industrial applications.
  • Traditional microscopy methods often involve mechanical scanning, limiting speed and precision.
  • Developing non-contact, high-resolution 3D measurement techniques is an ongoing challenge.

Purpose of the Study:

  • To propose and demonstrate a motionless polarizing structured illumination microscopy (PSIM) system.
  • To enable precise axial sectioning and reflective-type 3D surface profile measurement.
  • To eliminate mechanical moving parts for enhanced measurement stability and speed.

Main Methods:

  • Utilized spatial phase-shifting technique for illumination pattern visibility.
  • Employed a Wollaston prism for stable interference and generation of light patterns.
  • Used a polarization-pixelated CMOS camera and a quarter-wave plate for simultaneous acquisition of four phase-shifted patterns.
  • Integrated a focus-tunable lens for axial scanning, replacing mechanical components.

Main Results:

  • Successfully measured a step height sample with 0.05 µm repeatability.
  • Accurately determined the radius of curvature of a concave mirror with 0.2 mm repeatability.
  • Demonstrated the system's capability for high-precision 3D surface metrology without mechanical scanning.

Conclusions:

  • The developed motionless PSIM is an effective tool for precise 3D surface profiling.
  • The integration of polarization and spatial phase-shifting significantly enhances measurement accuracy.
  • The system offers a robust and efficient alternative to conventional mechanical scanning microscopy for surface analysis.