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Modeling a grating coupler-based interferometer for far-field-sensing of nanoscale displacements
Optics Express
|May 14, 2021
Summary
This study introduces a far-field grating coupler for nanoscale displacement sensing, enhancing dynamic range and resolution. This compact, integrated optical sensor shows promise for advanced metrology applications.
Area of Science:
- Optomechanics
- Nanoscale Metrology
- Optical Sensing
Background:
- Nanoscale displacement sensing is crucial for metrology, particularly in atomic-force microscopy.
- Nano-optomechanical sensors offer integration potential but often have limited dynamic range due to near-field interactions.
Purpose of the Study:
- To develop a far-field sensing approach for nanoscale displacement measurement.
- To introduce an analytical model for optimizing grating coupler performance, including resolution and dynamic range.
Main Methods:
- Utilized a grating coupler for far-field optical displacement sensing.
- Developed and applied an analytical model to tune sensor design parameters.
Main Results:
- Demonstrated a far-field sensing approach overcoming near-field limitations.
- The analytical model enabled optimization of resolution and dynamic range by exploring design parameters.
Conclusions:
- The proposed grating coupler sensor offers improved dynamic range and resolution for nanoscale displacement sensing.
- Its compact size and potential for on-chip integration make it suitable for advanced optical sensing systems.
