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Updated: Nov 5, 2025

Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
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Laser-printed hemispherical silicon Mie resonators.

Sergey Syubaev, Eugeny Mitsai, Sergey Starikov

    Optics Letters
    |May 14, 2021
    PubMed
    Summary
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    We present a new laser printing method for creating silicon nanoparticles (Si NPs) for nanophotonics. This technique allows for precise control over NP size and optical properties, enabling new applications.

    Area of Science:

    • Nanophotonics
    • Materials Science
    • Laser Technology

    Background:

    • Subwavelength nanostructures are crucial for advanced optical applications.
    • High-index, low-loss materials are in demand for nanophotonics.
    • Efficient and cost-effective fabrication methods are needed.

    Purpose of the Study:

    • To demonstrate a high-precision, reproducible method for fabricating silicon nanoparticles (Si NPs).
    • To control the size and optical properties of Si NPs using laser-driven dewetting.
    • To explore the potential of these Si NPs in optical sensing and nonlinear nanophotonics.

    Main Methods:

    • Utilizing controllable dewetting of amorphous silicon (α-Si) films on glass substrates.
    • Employing a single femtosecond laser pulse for nanoparticle formation.

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  • Combining numerical modeling and optical microspectroscopy to analyze optical responses.

    • Main Results:

    • Achieved high-precision and reproducible printing of hemispherical Si NPs.
    • Demonstrated full control over NP diameter via initial film thickness and laser spot size.
    • Confirmed resonant optical response linked to Mie-type resonances.
    • Developed an empirical model predicting NP diameter based on energy and mass conservation.

    Conclusions:

    • Direct laser printing offers an inexpensive and high-performance route to nanocrystalline Si Mie resonators.
    • User-defined arrangement of Si NPs facilitates diverse applications in optical sensing and nonlinear nanophotonics.
    • This fabrication technique advances the development of next-generation nanophotonic devices.