An Acquisition Parameter Study for Machine-Learning-Enabled Electron Backscatter Diffraction

Kevin Kaufmann1, Kenneth S Vecchio1

  • 1Department of NanoEngineering, UC San Diego, La Jolla, CA92093, USA.

Summary

Deep neural networks for analyzing electron diffraction patterns are robust. Varying experimental conditions like detector tilt or voltage had minimal impact on classification accuracy, ensuring reliable AI in materials science.