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An Acquisition Parameter Study for Machine-Learning-Enabled Electron Backscatter Diffraction
Kevin Kaufmann1, Kenneth S Vecchio1
1Department of NanoEngineering, UC San Diego, La Jolla, CA92093, USA.
Summary
Deep neural networks for analyzing electron diffraction patterns are robust. Varying experimental conditions like detector tilt or voltage had minimal impact on classification accuracy, ensuring reliable AI in materials science.
Area of Science:
- Materials Science
- Artificial Intelligence
- Computer Vision
Background:
- Artificial intelligence (AI) methods, particularly deep neural networks (DNNs), are increasingly used for materials science challenges.
- Analyzing electron diffraction patterns with DNNs is a key application, but performance under varied experimental conditions is crucial for deployment.
Purpose of the Study:
- To investigate the impact of varying key experimental parameters on the performance of DNNs used for electron diffraction pattern analysis.
- To identify which parameters most significantly affect classification accuracy and guide future data collection strategies.
Main Methods:
- Electron backscatter diffraction (EBSD) patterns were collected while individually varying five parameters: frame averaging, detector tilt, sample-to-detector distance, accelerating voltage, and pattern resolution.
- A DNN, pre-trained on EBSD patterns from a fixed condition set, was used to classify patterns generated under these varied conditions.
Main Results:
- The DNN model demonstrated significant resilience to individual variations in most tested experimental parameters.
- Performance degradation was minimal across a range of altered diffraction conditions, indicating robustness.
Conclusions:
- The study suggests that DNNs for electron diffraction analysis are robust to common experimental variations.
- This resilience builds confidence in deploying AI models across diverse operating conditions in materials science research.

