An Acquisition Parameter Study for Machine-Learning-Enabled Electron Backscatter Diffraction
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Updated: Nov 3, 2025

Quantitative Atomic-Site Analysis of Functional Dopants/Point Defects in Crystalline Materials by Electron-Channeling-Enhanced Microanalysis
Published on: May 10, 2021
Kevin Kaufmann1, Kenneth S Vecchio1
1Department of NanoEngineering, UC San Diego, La Jolla, CA92093, USA.
Abstract:
Methods within the domain of artificial intelligence are gaining traction for solving a range of materials science objectives, notably the use of deep neural networks for computer vision for the analysis of electron diffraction patterns. An important component of deploying these models is an understanding of the performance as experimental diffraction conditions are varied. This knowledge can inspire confidence in the classifications over a range of operating conditions and identify where performance is degraded. Elucidating the relative impact of each parameter will suggest the most important parameters to vary during the collection of future training data. Knowing which data collection efforts to prioritize is of concern given the time required to collect or simulate vast libraries of diffraction patterns for a wide variety of materials without considering varying any parameters. In this work, five parameters, frame averaging, detector tilt, sample-to-detector distance, accelerating voltage, and pattern resolution, essential to electron diffraction are individually varied during the collection of electron backscatter diffraction patterns to explore the effect on the classifications produced by a deep neural network trained from diffraction patterns captured using a fixed set of parameters. The model is shown to be resilient to nearly all the individual changes examined here.

