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Updated: Nov 1, 2025

Using Synchrotron Radiation Microtomography to Investigate Multi-scale Three-dimensional Microelectronic Packages
Published on: April 13, 2016
On-axis sample viewer with flexible working distance for an X-ray spectroscopy beamline
Abstract:
Conducting research using micrometer-sized X-ray beams with small samples is common at modern synchrotron X-ray sources. Often, the relative alignment between the X-ray beam and sample is time consuming. An on-axis or coaxial camera system with a view of the sample in a direction along the path of the X-ray beam with its depth of field set to coincide with the location of the focal spot of the X-ray beam is preferred. Besides the use of a drilled mirror, I propose the use of a Pellicle mirror to create an on-axis viewer that allows various sample environments and X-ray beam sizes.
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