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Investigation of 3.3 kV 4H-SiC DC-FSJ MOSFET Structures

Chia-Yuan Chen1, Yun-Kai Lai1, Kung-Yen Lee1,2

  • 1Department of Engineering Science and Ocean Engineering, National Taiwan University, Taipei 10617, Taiwan.

Micromachines
|July 2, 2021
PubMed

Keywords:
4H-SiCMOSFETbreakdown voltagesilicon carbidespecific on-resistancesuperjunction

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