A Study on Capacitive Micromachined Ultrasonic Transducer Periodic Sparse Array

Tian Zhang1,2, Wendong Zhang1,2, Xingling Shao1,2

  • 1State Key Laboratory of Dynamic Testing Technology, North University of China, Taiyuan 030051, China.

Micromachines
|July 2, 2021
PubMed
Summary

This study eliminates grating lobes in capacitive micromachined ultrasonic transducer (CMUT) arrays using periodic sparse array (PSA) pairs. Optimized PSA configurations reduce imaging artifacts, advancing CMUTs for 3D ultrasound.