Related Experiment Video
Updated: Oct 29, 2025

10:40
A Fabrication and Measurement Method for a Flexible Ferroelectric Element Based on Van Der Waals Heteroepitaxy
Published on: April 8, 2018
8.4K
In-Plane Ferroelectric Domain Wall Memory with Embedded Electrodes on LiNbO3 Thin Films
Meng Han Ao1, Si Zheng Zheng2, Qi Lan Zhong3
1State Key Laboratory of ASIC & System School of Microelectronics, Fudan University, Shanghai 200433, China.
ACS Applied Materials & Interfaces
|July 9, 2021
Summary
Lithium niobate (LiNbO3) thin films can now form domain wall memory without etching. New electrode designs improve domain stability and current, enabling damage-free memory cell fabrication.
Area of Science:
- Materials Science
- Solid State Physics
- Nanotechnology
Background:
- Lithium niobate (LiNbO3) thin films are promising for high-density domain wall memory.
- Traditional fabrication methods involving etching are challenging due to LiNbO3's hardness and inertness, risking ferroelectric damage.
- Etching also limits the ability to create inclined side edges crucial for polarization retention.
Purpose of the Study:
- To develop an etching-free technique for fabricating LiNbO3-based memory cells.
- To overcome poor domain retention and weak wall currents in previous gapped electrode designs.
- To enhance the stability and read-out capabilities of domain wall memory in LiNbO3 thin films.
Main Methods:
- Developed a technique to deposit gapped electrodes directly onto the LiNbO3 film surface, avoiding etching.
- Investigated domain switching via in-plane voltage application, creating conducting domain walls.
- Fabricated embedded electrodes diffusing into the film to screen depolarization fields and explored critical gap distances for domain stabilization.
Main Results:
- Demonstrated reversible domain switching and "on"/"off" current read by creating/erasing conducting domain walls.
- Embedded electrodes significantly improved domain retention and wall current by screening depolarization fields.
- Increasing the gap distance beyond 320 nm also stabilized switched domains without embedded electrodes.
Conclusions:
- Etching-free fabrication of LiNbO3 memory cells is achievable using novel electrode integration.
- Embedded electrodes or optimized gap distances effectively mitigate depolarization fields, enhancing memory performance.
- These advancements pave the way for damage-free, high-density domain wall memory devices based on LiNbO3.
Keywords:
LiNbO3 thin filmscharge injectiondepolarization fieldembedded electrodesferroelectric domain wall memorylarge wall current
