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Updated: Oct 28, 2025

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Evolution in X-ray analysis from micro to atomic scales in aberration-corrected scanning transmission electron

M Watanabe1, R F Egerton2

  • 1Department of Materials Science and Engineering, Lehigh University, 5 East Packer Avenue, Bethlehem, PA 18015-3195, USA.

Microscopy (Oxford, England)
|July 15, 2021
PubMed

Keywords:
aberration-corrected STEMatomic-resolution analysisquantitative analysissilicon drift detectorsingle-atom characterizationζ-factor method

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