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Updated: Oct 28, 2025

Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
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Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators

Published on: August 8, 2025

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Persistent Response in an Ultrastrongly Driven Mechanical Membrane Resonator

Fan Yang1, Felicitas Hellbach1, Felix Rochau1

  • 1Fachbereich Physik, Universität Konstanz, 78457 Konstanz, Germany.

Physical Review Letters
|July 16, 2021
PubMed

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