Photonic-dispersion neural networks for inverse scattering problems

Tongyu Li1,2, Ang Chen2, Lingjie Fan1,2

  • 1State Key Laboratory of Surface Physics, Key Laboratory of Micro- and Nano-Photonics Structures (Ministry of Education) and Department of Physics, Fudan University, Shanghai 200433, China.

Summary

We developed a robust neural network strategy to accurately reconstruct grating profiles from optical scattering data. This method overcomes experimental noise and parameter challenges for precise nanometric measurements.

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