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Analysis of Optical Diffraction Profiles Created by Phase-Modulating MEMS Micromirror Arrays.
Tarek Mohammad1, Siyuan He2, Ridha Ben Mrad1
1Department of Mechanical and Industrial Engineering, University of Toronto, Toronto, ON M5S 3G8, Canada.
Micromachines
|August 27, 2021
Summary
This study models optical phased array (OPA) systems using micromirrors for light control. Experiments show these microelectromechanical systems (MEMS) can steer diffracted light beams for applications like distance measurement.
Area of Science:
- Optics and Photonics
- Microelectromechanical Systems (MEMS)
Background:
- Optical phased arrays (OPAs) are crucial for beam steering and modulation.
- Microelectromechanical systems (MEMS) offer miniaturized solutions for optical control.
Purpose of the Study:
- To model and analyze light diffraction and intensity modulation in MEMS-based OPA systems.
- To predict the optical performance (field of view, resolution, transmission) of OPA devices.
- To design OPA systems for active phase modulation and array pitch tuning.
Main Methods:
- Developed extended models for 1st-order diffracted light intensity modulation.
- Utilized numerical results for optical characteristic estimations.
- Fabricated OPA prototypes using Multi-User MEMS Processes (PolyMUMPs) with polysilicon micromirrors.
Main Results:
- Individually actuated micromirrors effectively act as phase shifters.
- Maximized optical power transmission along the 1st-order diffracted beam through active position control.
- Demonstrated steering of high-intensity 1st-order diffracted beams for distance measurement.
Conclusions:
- The developed models accurately predict OPA performance.
- MEMS-based OPA systems enable precise control over light intensity and direction.
- The technology is suitable for applications requiring active phase modulation and beam steering, such as distance measurement.
