Development of an Energy-Sensitive Detector for the Atom Probe Tomography

Christian Bacchi1, Gérald Da Costa1, Emmanuel Cadel1

  • 1Normandie Université, UNIROUEN, INSA Rouen, CNRS, Groupe de Physique des Matériaux, 76000Rouen, France.

Summary

A novel detector for atom probe tomography (APT) uses secondary electrons from carbon foils to distinguish particle energies. This innovation aims to resolve mass peak overlaps in critical materials analysis.

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