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MEMS-actuated metasurface Alvarez lens
Zheyi Han1,2, Shane Colburn1, Arka Majumdar1,3
1Department of Electrical and Computer Engineering, University of Washington, Seattle, Washington 98195 USA.
Microsystems & Nanoengineering
|September 27, 2021
Summary
Researchers developed a miniature, microelectromechanical system (MEMS)-actuated Alvarez metalens. This tunable focus lens offers fast, low-power operation and potential for mass production in compact optical systems.
Area of Science:
- Optics and Photonics
- Microelectromechanical Systems (MEMS)
Background:
- Tunable lenses are crucial for compact optical systems but often suffer from high power consumption, slow tuning speeds, and high fabrication costs.
- Existing tunable lens technologies face limitations in scalability and performance.
Purpose of the Study:
- To develop a miniature tunable lens using a microelectromechanical system (MEMS)-actuated metasurface Alvarez lens.
- To overcome the limitations of conventional tunable lenses regarding power consumption, tuning speed, and fabrication cost.
Main Methods:
- Adapted the Alvarez lens mechanism using metasurfaces and electrostatic MEMS actuation.
- Fabricated a prototype MEMS Alvarez metalens compatible with semiconductor manufacturing processes.
- Tested the device at a 1550 nm wavelength with DC voltage up to 20 V.
Main Results:
- Achieved a total uniaxial displacement of 6.3 µm.
- Demonstrated a focal position modulation with a tuning range of 68 µm.
- Produced over a tenfold change in focal length and a 1460-diopter change in optical power.
Conclusions:
- The MEMS Alvarez metalens offers fast, low-power, and controllable actuation.
- Metasurface integration significantly reduces device volume.
- The design is compatible with mass production, promising low unit costs for imaging and display applications.
