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Directly addressable GaN-based nano-LED arrays: fabrication and electro-optical characterization.

Daria D Bezshlyakh^1,2, Hendrik Spende^1,2,3, Thomas Weimann⁴

¹Institute of Semiconductor Technology, Technische Universität Braunschweig, Hans-Sommer Str. 66, 38106 Braunschweig, Germany.

Microsystems & Nanoengineering

|September 27, 2021

Summary

This summary is machine-generated.

Researchers developed novel Gallium nitride (GaN) nano-light-emitting diode (LED) arrays for individually controlled microscale light sources. These nanoLEDs enable subwavelength pitch for advanced imaging applications.

Keywords:

Micro-optics Nanophotonics and plasmonics

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Area of Science:

Materials Science
Optoelectronics
Nanotechnology

Background:

Advancements in display technology drive demand for individually controlled microscale light sources.
Gallium nitride (GaN) micro-light-emitting diodes (LEDs) show promise but face limitations in fabricating submicron, individually addressable arrays.

Purpose of the Study:

To present a novel approach for fabricating individually addressable nanoLED arrays with subwavelength pitch.
To demonstrate the design and fabrication of GaN nanoLEDs for on-chip super-resolution microscopy.

Main Methods:

Development of nanoLED arrays with direct addressing capabilities.
Fabrication of two distinct geometries: a 6 × 6 array of 400 nm LEDs and a 2 × 32 line array of 200 nm LEDs.
Utilizing Gallium nitride (GaN) material properties for nanoLED fabrication.

Main Results:

Successful fabrication of nanoLED arrays with dimensions below the wavelength of light.
Demonstrated capability for individual addressing of each nanoLED element.
GaN nanoLEDs achieved required specifications for integration into super-resolution microscopy.

Conclusions:

GaN nanoLED arrays offer a viable solution for individually controlled microscale light sources.
The developed nanoLED technology is suitable for creating novel on-chip super-resolution microscopes.
GaN's inherent properties make it an ideal platform for advanced nano-optical devices.