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Updated: Oct 18, 2025

In Situ Transmission Electron Microscopy with Biasing and Fabrication of Asymmetric Crossbars Based on Mixed-Phased a-VOx
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Understanding the Origin of Metal Gate Work Function Shift and Its Impact on Erase Performance in 3D NAND Flash

Sivaramakrishnan Ramesh1, Arjun Ajaykumar1, Lars-Åke Ragnarsson1

  • 1IMEC, Kapeldreef 75, B-3001 Leuven, Belgium.

Micromachines
|September 28, 2021
PubMed

Keywords:
3D NAND flash memoryMHONOSSiO2dipoleeffective work functionerase performancehigh-kinterfacial reactionmetal gatework function

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