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Updated: Oct 18, 2025

Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
Published on: August 8, 2025
Ultra-coherent nanomechanical resonators based on inverse design
Dennis Høj1, Fengwen Wang2, Wenjun Gao2,3
1Center for Macroscopic Quantum States (bigQ), Department of Physics, Technical University of Denmark, Fysikvej, 2800, Kgs. Lyngby, Denmark. denho@fysik.dtu.dk.
Computer-aided inverse design optimizes mechanical resonators for quantum technology. This approach yields ultra-coherent nanomechanical resonators with record-high performance, enabling new physics experiments and advanced sensing applications.
Area of Science:
- Quantum technologies
- Nanomechanics
- Materials science
Background:
- Micro- and nanomechanical resonators are crucial for quantum technologies.
- Current design methods rely on intuition, limiting exploration of optimal structures.
- There is a need for advanced design strategies to enhance resonator performance.
Purpose of the Study:
- To employ computer-aided inverse design for optimizing mechanical resonator structures.
- To achieve enhanced performance in the fundamental mechanical mode of resonators.
- To fabricate and characterize novel ultra-coherent nanomechanical resonators.
Main Methods:
- Utilized topology optimization, a computer-aided inverse design approach.
- Focused on optimizing the structural design for the fundamental mechanical mode.
- Fabricated and experimentally characterized the designed nanomechanical resonators.
Main Results:
- Achieved ultra-coherent nanomechanical resonators with ultra-low dissipation.
- Reported record-high quality factor-frequency (Q⋅f) products for the fundamental mode.
- Demonstrated the efficacy of topology optimization in resonator design.
Conclusions:
- Topology optimization offers a new paradigm for designing high-performance micro- and nanomechanical resonators.
- The developed resonators enable advancements in fundamental physics research and extreme sensing.
- This approach can be extended to design other micro- and nanomechanical devices like phononic crystals.
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