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Using Digital Image Correlation to Characterize Local Strains on Vascular Tissue Specimens

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Active speckle deflectometry based on 3D digital image correlation.

Xinwei Zhang, Dahai Li, Ruiyang Wang

|October 7, 2021

Summary

This summary is machine-generated.

A novel active speckle deflectometry (ASD) method uses 3D digital image correlation (DIC) for precise specular surface shape measurement. This technique offers fast, low-cost, and flexible measurements without needing known LCD movement parameters.

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Area of Science:

Optical Metrology
Surface Metrology
3D Shape Measurement

Background:

Specular surfaces require accurate shape measurement for various applications.
Traditional methods can be complex, costly, or have limitations in flexibility.

Purpose of the Study:

To propose and validate a new method, active speckle deflectometry (ASD), for measuring specular surface shapes.
To leverage 3D digital image correlation (DIC) for enhanced measurement capabilities.

Main Methods:

Utilizes a stereo-camera system to monitor a moving liquid crystal display (LCD) screen.
Employs a testing camera (TC) to capture reflected speckle patterns.
Applies 3D DIC to determine point source coordinates from LCD movement, enabling slope and shape calculation.

Main Results:

Demonstrated high accuracy with a shape measurement difference of 0.278 µm RMS compared to interferometry for a flat glass.
Successfully measured the shape of wafers, showing comparable results to traditional phase measuring deflectometry (PMD).

Conclusions:

ASD offers a fast, low-cost, and flexible approach for specular surface measurement.
The method is tolerant to arbitrary LCD movements and out-of-plane LCD shape variations.
Provides a viable new technique for optical metrology of specular surfaces.