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Diamond-Coated Silicon ATR Elements for Process Analytics.

Nicolai Arndt1, Carsten Bolwien1, Gerd Sulz1

  • 1Fraunhofer IPM, Georges-Köhler-Allee 301, D-79110 Freiburg, Germany.

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Summary

Nanocrystalline diamond coatings on silicon enhance infrared attenuated total reflection (ATR) spectroscopy for industrial use. This advancement improves sensor stability and sensitivity for mid-infrared analysis, extending spectral range and reducing costs.

Keywords:
ATR (attenuated total reflection)PAT (process analytical technology)acetonitrilediamondinfrared spectroscopyinlinenanocrystallineonlinepropylene carbonatesapphiresilicon

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Area of Science:

  • Spectroscopy
  • Materials Science
  • Chemical Engineering

Background:

  • Infrared attenuated total reflection (ATR) spectroscopy is limited in industrial applications due to material instability and poor performance at longer wavelengths.
  • Existing ATR elements, like sapphire and diamond, have limitations in transmission, mechanical stability, and cost for process monitoring.
  • There is a need for robust and cost-effective ATR sensors suitable for harsh industrial environments and extended spectral ranges.

Purpose of the Study:

  • To investigate the use of nanocrystalline diamond (NCD) coatings on silicon for enhanced ATR spectroscopy.
  • To optimize NCD coating thickness for improved ATR absorbance and sensitivity.
  • To evaluate the performance of NCD-coated silicon ATR elements for mid-infrared (MIR) spectroscopy in industrial settings.

Main Methods:

  • Theoretical and experimental analysis of ATR absorbance dependence on incidence angle and NCD coating thickness on silicon.
  • Fabrication of planar ATR elements using coated and uncoated silicon.
  • Measurement of ATR spectra of various liquid samples (water, acetonitrile, propylene carbonate) using a compact Fourier-transform infrared (FTIR) instrument.

Main Results:

  • Optimizing NCD coating thickness significantly amplified ATR absorbance compared to uncoated silicon.
  • NCD-coated silicon ATR elements extended the usable spectral range to approximately 8 μm, surpassing sapphire's limitations.
  • The sensitivity of the NCD-coated silicon ATR elements, with effectively nine reflections, is expected to outperform typical diamond tip probes.

Conclusions:

  • Nanocrystalline diamond coatings on silicon offer a promising solution for robust and cost-effective ATR spectroscopy in industrial processes.
  • The enhanced stability and sensitivity of these NCD-coated sensors enable reliable inline and continuous measurements.
  • This technology expands the application of MIR ATR spectroscopy to challenging environments and longer wavelengths.