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Edge Control in the Computer-Controlled Optical Surface.

Lianmin Yin^1,2, Hao Hu^1,2, Chaoliang Guan^1,2

¹Laboratory of Science and Technology on Integrated Logistics Support, College of Intelligence Science and Technology, National University of Defense Technology, Changsha 410073, China.

|October 23, 2021

Summary

This summary is machine-generated.

A new combined polishing method effectively controls the edge effect in computer-controlled optical surface (CCOS) processing. This technique improves full-aperture machining and reduces residual errors for optical surfaces.

Keywords:

CCOS combined polishing method edge effect

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Area of Science:

Optics and Materials Science
Precision Engineering

Background:

Computer-controlled optical surface (CCOS) processing yields high-quality optical surfaces but suffers from significant edge effects.
The edge effect is primarily caused by nonlinear pressure variations and incomplete material removal at the surface periphery.

Purpose of the Study:

To address the limitations of CCOS by developing a novel combined polishing method.
To mitigate the detrimental edge effect in optical surface fabrication.

Main Methods:

A combined polishing approach integrating double-rotor polishing and spin-polishing was proposed.
A theoretical model of the combined polishing method was established and analyzed.
The method was applied to machine a 100 mm diameter single-crystal silicon sample.

Main Results:

The combined polishing process achieved full-aperture machining without pressure fluctuations.
Compared to traditional CCOS, the combined method resulted in more convergent residual errors.
Effective control of the edge effect was demonstrated on the silicon sample.

Conclusions:

The proposed combined polishing method overcomes the edge effect limitations of CCOS.
This technique enhances the precision and applicability of optical surface processing.
The study validates the efficacy of integrating double-rotor and spin-polishing for superior optical finishing.