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Research on Optimized Design of In Situ Dynamic Variable-Aperture Device for Variable-Spot Ion Beam Figuring.

Hongyu Zou^1,2, Hao Hu^1,2, Xiaoqiang Peng^1,2

¹College of Intelligent Science and Technology, National University of Defense Technology, Changsha 410073, China.

|August 28, 2025

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Ion beam figuring (IBF) uses a dynamic aperture device to adjust spot size, balancing efficiency and precision. This innovation overcomes limitations of fixed apertures for ultra-high-precision surface finishing.

Area of Science:

Materials Science and Engineering
Optical Engineering
Nanotechnology

Background:

Ion beam figuring (IBF) is a critical ultra-high-precision surface finishing technique.
A key challenge in IBF is the trade-off between removal spot size and figuring accuracy.
Existing variable-aperture tools have limitations in optimizing this trade-off.

Purpose of the Study:

To design and validate an in situ dynamic beam variable-aperture device for IBF.
To overcome the limitations of conventional IBF processing by enabling flexible spot size adjustment.
To enhance the efficiency, flexibility, and accuracy of IBF.

Main Methods:

Designed a novel in situ dynamic beam variable-aperture device.
Optimized diaphragm sheet parameters and utilized focusing coil (FOC) for dynamic aperture control.

Keywords:

FOC diaphragm sheets ion beam figuring removal function variable aperture variable spot

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Conducted simulations to assess removal function distortion and experimental validation of spot size adjustability and precision.

Main Results:

Simulations indicated minimal removal function distortion (<5%) with optimized diaphragm sheets.
FOC enabled rapid (≤0.45 s) and precise aperture control.
Experiments demonstrated adjustable spot sizes (FWHM 0.7-17.2 mm) with high Gaussian correlation (>96.7%), stable parameters (≤5% change rate), and precise repeatability (≤3.2% change rate).

Conclusions:

The developed dynamic beam variable-aperture device effectively addresses the IBF spot size trade-off.
This technology enhances IBF processing efficiency, flexibility, and accuracy.
It overcomes conventional limitations, paving the way for advanced ultra-high-precision surface finishing.