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Interfacial engineering of a Mo/Hf0.3Zr0.7O2/Si capacitor using the direct scavenging effect of a thin Ti layer
Se Hyun Kim1, Geun Taek Yu1, Geun Hyeong Park1
1School of Materials Science and Engineering, Pusan National University, Busan 46241, Republic of Korea. jilee@pnu.ac.kr.
Abstract:
An antiferroelectric Mo/Hf0.3Zr0.7O2/SIO/Si capacitor was engineered using the direct scavenging effect of a sputtered Ti sacrificial layer. Charge trapping could be mitigated with the oxidized TiO2 layer, and the endurance could be enhanced beyond 109 cycles, which is higher than that of the gate stack of ferroelectric field-effect-transistors by 3-4 orders of magnitude.
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